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Description: LSRL HOME PAGE
Keywords:High yield, fast turnaround buried layer epi, Selective and non-selective Si1-x-yGexCy, Etch stop layers SiGeB, SiGeBC, Si:B, SiGeC, Strained layer epitaxy, Silicon on Insulator SOI, Novel Group IV materials, Silicon on SapphireSOS, Novel Group III and IV dopants, Selective epitaxial Silicon SEG, Ge epi layers
